Sampling techniques for the analysis of microscopic foreign substances
We will report rapid analysis results using various sampling techniques regarding foreign substances that significantly impact the yield of electronics products.
■Special Sampling Techniques for Foreign Substances in Multilayer Films - Foreign substances buried in metal films on substrates Metal film etching ⇒ Transfer to Si wafer ⇒ FT-IR analysis - Foreign substances in multilayer films Cutting off the surface layer ⇒ Transfer to Si wafer ⇒ FT-IR analysis Microtome/FIB thinning ⇒ Transfer to Si wafer ⇒ FT-IR analysis
- Company：アイテス
- Price：Other
